A Pure-play Foundry for
MEMS and Thin-film Devices
Midwest MicroDevices Class 10 Cleanroom

Metrology

At MMD, we take pride in offering our customers repeatable, reliable, MEMS production services. To ensure this level of quality, all of our major fabrication processes are continually monitored through a full set of metrology tools. Process monitors and quality checks are automatically built-in to our production process flows. Consistent quality checks at every major stage of device production is a key to our success.

Capabilities

  • Microscope inspection
  • SEM inspection
  • Line-width inspection
  • Resistivity/sheet resistance
  • Mechanical profilometry
  • Optical profilometry
  • Stress measurement
  • Optical interferometry
  • Ellipsometry
  • IR bond inspection
  • EDX, Auger, ESCA material analysis
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