Silicon micromaching is a key aspect of modern MEMS device fabrication. MMD has developed extensive expertise in this area using a wide variety of micromachining methods. An advanced, STS Pegasus DRIE is used for fast, high aspect ratio silicon etching. KOH, TMAH, and EDP etchants are all used for bulk silicon etching and device release. Xenon difluoride is also utilized for fast, isotropic silicon etching and device release.